A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator
Dong, B., Cai, H., Ng, G. I., Kropelnicki, P., Tsai, J. M., Randles, A. B., Tang, M., Gu, Y. D., Suo, Z. G., Liu, A. Q.Volume:
103
Year:
2013
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4827096
File:
PDF, 1.40 MB
english, 2013