Transition Metals for Selective Chemical Vapor Deposition...

Chemistry of Materials 2000 / 05 Vol. 12; Iss. 5

Transition Metals for Selective Chemical Vapor Deposition of Parylene-Based Polymers

Vaeth, Kathleen M., Jensen, Klavs F.
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Volume:
12
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm990642p
Date:
May, 2000
File:
PDF, 374 KB
english, 2000
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