Use of Water-Soluble Sugars as Novel Cross-Linkers in Electrophilic Processes: Application to Negative-Tone Photoresists Based on Poly(4-hydroxystyrene)
Lee, S. Ming, Frechet, Jean M. J.Volume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00046a043
Date:
October, 1994
File:
PDF, 874 KB
english, 1994