[IEEE 2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2013) - Saratoga Springs, NY (2013.5.14-2013.5.16)] ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference - On the generation and elimination of lonely poly-silicon crater-defects and their impacts on gate oxide integrity (GOI) in dual-gate technology
Lieyi Sheng,, Porath, Paul, Glines, EddieYear:
2013
Language:
english
DOI:
10.1109/asmc.2013.6552764
File:
PDF, 924 KB
english, 2013