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Development of SiC Super-Junction (SJ) Devices by Multi-Epitaxial Growth
Kosugi, Ryoji, Sakuma, Yuuki, Kojima, Kazutoshi, Itoh, Sachiko, Nagata, Akiyo, Yatsuo, Tsutomu, Tanaka, Yasunori, Okumura, HajimeVolume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.778-780.845
Date:
February, 2014
File:
PDF, 972 KB
english, 2014