Secondary ion mass spectrometric ion yields and detection...

Analytical Chemistry 1988 / 01 Vol. 60; Iss. 1

Secondary ion mass spectrometric ion yields and detection limits of impurities in indium phosphide

Tanaka, Toru., Homma, Yoshikazu., Kurosawa, Satoru.
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Volume:
60
Language:
english
Journal:
Analytical Chemistry
DOI:
10.1021/ac00152a015
Date:
January, 1988
File:
PDF, 522 KB
english, 1988
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