Improvement of Crystal Quality of n-AlGaN by...

Japanese Journal of Applied Physics 2007 / 9 Vol. 46; Iss. 9A

Improvement of Crystal Quality of n-AlGaN by Alternate-Source-Feeding Metal Organic Vapor Phase Epitaxy

Isono, Ken-ichi, Niikura, Eiichiro, Murakawa, Koichi, Hasegawa, Fumio, Kawanishi, Hideo
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.46.5711
Date:
September, 2007
File:
PDF, 215 KB
english, 2007
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