ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Review of Silicon Nanowire Oxidation
Shi, Xiaoping, Kurstjens, Rufi, Vos, Ingrid, Everaert, Jean-Luc, Schaekers, MarcYear:
2011
Language:
english
DOI:
10.1149/1.3567632
File:
PDF, 258 KB
english, 2011