Design, Synthesis, and Characterization of Carbon-Rich...

Chemistry of Materials 2001 / 11 Vol. 13; Iss. 11

Design, Synthesis, and Characterization of Carbon-Rich Cyclopolymers for 193 nm Microlithography

Pasini, Dario, Klopp, John M., Fréchet, Jean M. J.
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Volume:
13
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm0104304
Date:
November, 2001
File:
PDF, 151 KB
english, 2001
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