SANS and XRR Porosimetry of a Polyphenylene Low-...

SANS and XRR Porosimetry of a Polyphenylene Low- k Dielectric

Silverstein, Michael S., Bauer, Barry J., Hedden, Ronald C., Lee, Hae-Jeong, Landes, Brian G.
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Volume:
39
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma052395i
Date:
April, 2006
File:
PDF, 232 KB
english, 2006
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