Kinetics study of orientation-dependent surface blistering...

Surface and Interface Analysis 2014 / 12 Vol. 46; Iss. 12-13

Kinetics study of orientation-dependent surface blistering and exfoliation process in hydrogen-implanted germanium

Chien, C. C., Chao, D. S., Liang, J. H.
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Volume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5602
Date:
December, 2014
File:
PDF, 679 KB
english, 2014
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