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[IEEE ESSDERC 2013 - 43rd European Solid State Device Research Conference - Bucharest, Romania (2013.09.16-2013.09.20)] 2013 Proceedings of the European Solid-State Device Research Conference (ESSDERC) - Design of a poly silicon MEMS microphone for high signal-to-noise ratio
Dehe, Alfons, Wurzer, Martin, Fuldner, Marc, Krumbein, UlrichYear:
2013
Language:
english
DOI:
10.1109/essderc.2013.6818876
File:
PDF, 1.58 MB
english, 2013