Experimental and Theoretical Study of the Formation of...

Experimental and Theoretical Study of the Formation of Silicon−Carbon Ion Species in Gaseous Silane/Ethene Mixtures

Antoniotti, Paola, Canepa, Carlo, Operti, Lorenza, Rabezzana, Roberto, Tonachini, Glauco, Vaglio, Gian Angelo
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Volume:
103
Language:
english
Journal:
The Journal of Physical Chemistry A
DOI:
10.1021/jp992722m
Date:
December, 1999
File:
PDF, 160 KB
english, 1999
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