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Fast wet anisotropic etching of silicon utilizing microwave treatment of KOH etchant
Walczak, Rafal, Dziuban, JanVolume:
17
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/17/1/008
Date:
January, 2006
File:
PDF, 990 KB
english, 2006