Tensile strength of aluminium nitride films

Philosophical Magazine 2004 / 11 Vol. 84; Iss. 31

Tensile strength of aluminium nitride films

Gang Zong, Deng, Wo Ong †, Chung, Aravind, Manju, Po Tsang, Mei, Loong Choy, Chung, Lu, Deren, Ma, Dejun
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Volume:
84
Language:
english
Journal:
Philosophical Magazine
DOI:
10.1080/14786430412331283604
Date:
November, 2004
File:
PDF, 313 KB
english, 2004
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