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[IEEE 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Besacon (2014.7.8-2014.7.11)] 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Robust tracking of nanopositioning stages using sliding mode control with a PID sliding surface
Gu, Guo-Ying, Li, Chun-Xia, Zhu, Li-Min, Fatikow, SergejYear:
2014
Language:
english
DOI:
10.1109/aim.2014.6878206
File:
PDF, 526 KB
english, 2014