Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN...

ACS Applied Materials & Interfaces 2014 / 05 Vol. 6; Iss. 10

Thermal and Plasma-Enhanced Atomic Layer Deposition of TiN Using TDMAT and NH 3 on Particles Agitated in a Rotary Reactor

Longrie, Delphine, Deduytsche, Davy, Haemers, Jo, Smet, Philippe F., Driesen, Kris, Detavernier, Christophe
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am5007222
Date:
May, 2014
File:
PDF, 3.99 MB
english, 2014
Conversion to is in progress
Conversion to is failed