Atomic Layer Chemical Vapor Deposition of TiO[sub 2] Low...

Journal of The Electrochemical Society 2000 Vol. 147; Iss. 9

Atomic Layer Chemical Vapor Deposition of TiO[sub 2] Low Temperature Epitaxy of Rutile and Anatase

Schuisky, Mikael, Hårsta, Anders, Aidla, Aleks, Kukli, Kaupo, Kiisler, Alma-Asta, Aarik, Jaan
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Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393901
File:
PDF, 275 KB
english, 2000
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