Fabrication techniques for multiscale 3D-MEMS with vertical...

Journal of Micromechanics and Microengineering 2013 / 02 Vol. 23; Iss. 2

Fabrication techniques for multiscale 3D-MEMS with vertical metal micro- and nanowire integration

Greiner, F, Quednau, S, Dassinger, F, Sarwar, R, Schlaak, H F, Guttmann, M, Meyer, P
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/2/025018
Date:
February, 2013
File:
PDF, 1.15 MB
english, 2013
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