High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI...

Materials Science Forum 2001 Vol. 353-356

High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications

Zappe, S., Franklin, J., Obermeier, E., Eickhoff, M., Möller, H., Krötz, G., Rougeot, C., Lefort, O., Stoemenos, J.
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Volume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.353-356.753
File:
PDF, 326 KB
2001
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