Hybrid approach for the design of mirror array to produce freeform illumination sources in immersion lithography
Wei, Lidong, Li, YanqiuVolume:
125
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2014.06.116
Date:
October, 2014
File:
PDF, 1.38 MB
english, 2014