X-ray diffraction and reflectivity characterization of SiGe...

X-ray diffraction and reflectivity characterization of SiGe superlattice structures

Powell, A R, Bowen, D K, Wormington, M, Kubiak, R A, Parker, E H C, Hudson, J, Augustus, P D
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Volume:
7
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/7/5/001
Date:
May, 1992
File:
PDF, 290 KB
english, 1992
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