Design of New Positive-Tone Photoresists Based on the Acid-Catalyzed Hydrolysis of Phenylmethanediol Diesters
Lee, S. Ming, Frechet, Jean M. J.Volume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00046a042
Date:
October, 1994
File:
PDF, 1.74 MB
english, 1994