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[IEEE 2009 Mediterranean Microwave Symposium (MMS) - Tangiers, Morocco (2009.11.15-2009.11.17)] 2009 Mediterrannean Microwave Symposium (MMS) - Investigation of residual stress effects and modeling of spring constant for RF MEMS switches
Ur Rahman, Hamood, Chan, King Yuk, Ramer, RodicaYear:
2009
Language:
english
DOI:
10.1109/mms.2009.5409828
File:
PDF, 2.27 MB
english, 2009