A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator...

IEEE Electron Device Letters 2008 / 07 Vol. 29; Iss. 7

A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

Lee, Joshua E.-Y., Bahreyni, Behraad, Zhu, Yong, Seshia, Ashwin A.
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Volume:
29
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2008.2000643
Date:
July, 2008
File:
PDF, 362 KB
english, 2008
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