[IEEE ICMTS 1998. International Conference on Microelectronic Test Structures - Kanazawa, Japan (23-26 March 1998)] ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) - New method for monitoring of analogue processes-evaluation of the impact of metalisation on the performance of precise analogue resistors

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