Influences of pretreatment and hard baking on the...

Influences of pretreatment and hard baking on the mechanical reliability of SU-8 microstructures

Morikaku, Toshiyuki, Kaibara, Yoshinori, Inoue, Masatoshi, Miura, Takuya, Suzuki, Takaaki, Oohira, Fumikazu, Inoue, Shozo, Namazu, Takahiro
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/10/105016
Date:
October, 2013
File:
PDF, 1.48 MB
english, 2013
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