Development of Reactive-Ion Etching for ZnO-Based...

IEEE Transactions on Nanotechnology 2011 / 07 Vol. 10; Iss. 4

Development of Reactive-Ion Etching for ZnO-Based Nanodevices

Lee, Kin Kiong, Luo, Yi, Lu, Xiaofeng, Bao, Peng, Song, Aimin M.
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Volume:
10
Language:
english
Journal:
IEEE Transactions on Nanotechnology
DOI:
10.1109/tnano.2010.2085013
Date:
July, 2011
File:
PDF, 488 KB
english, 2011
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