Roughness evolution during the atomic layer deposition of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2013 Vol. 31; Iss. 6

Roughness evolution during the atomic layer deposition of metal oxides

Premkumar, Peter Antony, Delabie, Annelies, Rodriguez, Leonard N. J., Moussa, Alain, Adelmann, Christoph
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4812707
File:
PDF, 758 KB
english, 2013
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