Crack-free AlGaN/GaN distributed Bragg reflectors...

Materials Science in Semiconductor Processing 2014 / 11 Vol. 27

Crack-free AlGaN/GaN distributed Bragg reflectors synthesized by insertion of a thin SiNx interlayer grown on 6H-SiC substrate by metal–organic chemical vapor deposition

Tao, Pengcheng, Liang, Hongwei, Wang, Dongsheng, Xia, Xiaochuan, Feng, Qiuju, Liu, Yang, Shen, Rensheng, Zhang, Kexiong, Luo, Yingmin, Guo, Wenping, Deng, Qunxiong, Du, Guotong
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Volume:
27
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2014.08.003
Date:
November, 2014
File:
PDF, 1.58 MB
english, 2014
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