A DATA CLUSTERING MODEL FOR WAFER YIELD LOSS IN...

Journal of the Chinese Institute of Industrial Engineers 2004 / 01 Vol. 21; Iss. 4

A DATA CLUSTERING MODEL FOR WAFER YIELD LOSS IN SEMICONDUCTOR MANUFACTURING

Liu, Shu-Fan, Chen, Fei-Long
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Volume:
21
Language:
english
Journal:
Journal of the Chinese Institute of Industrial Engineers
DOI:
10.1080/10170660409509413
Date:
January, 2004
File:
PDF, 214 KB
english, 2004
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