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Thermal Chemistry of Cu(I)-Iminopyrrolidinate and Cu(I)-Guanidinate Atomic Layer Deposition (ALD) Precursors on Ni(110) Single-Crystal Surfaces
Kim, Taeseung, Yao, Yunxi, Coyle, Jason P., Barry, Seán T., Zaera, FranciscoVolume:
25
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm401707h
Date:
September, 2013
File:
PDF, 3.44 MB
english, 2013