Time-resolved optical measurement of Si lattice temperature...

Physica B+C 1983 Vol. 117-118; Iss. part-P2

Time-resolved optical measurement of Si lattice temperature during nanosecond pulsed laser annealing

Kouichi Murakami, Hisayoshi Itoh, Kōki Takita, Kohzoh Masuda
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Volume:
117-118
Year:
1983
Language:
english
Pages:
3
DOI:
10.1016/0378-4363(83)90726-x
File:
PDF, 232 KB
english, 1983
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