Surface Chemistry in the Atomic Layer Deposition of TiN Films from TiCl 4 and Ammonia
Tiznado, Hugo, Zaera, FranciscoVolume:
110
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp062019f
Date:
July, 2006
File:
PDF, 294 KB
english, 2006