Chemical vapor deposition of ruthenium and osmium thin films using (hexafluoro-2-butyne)tetracarbonylruthenium and -osmium
Senzaki, Yoshihide, Gladfelter, Wayne L., McCormick, Fred B.Volume:
5
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00036a008
Date:
December, 1993
File:
PDF, 2.42 MB
english, 1993