Photocrosslinking of Poly(4-hydroxystyrene) via...

Macromolecules 1994 / 08 Vol. 27; Iss. 18

Photocrosslinking of Poly(4-hydroxystyrene) via Electrophilic Aromatic Substitution: Use of Polyfunctional Benzylic Alcohols in the Design of Chemically Amplified Resist Materials with Tunable Sensitivities

Lee, S. Ming, Frechet, Jean M. J., Willson, C. Grant
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Volume:
27
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma00096a044
Date:
August, 1994
File:
PDF, 1.50 MB
english, 1994
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