[IEEE 7th International Conference on Solid-State and...

[IEEE 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Beijing, China (Oct. 18-21, 2004)] Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. - Homoepitaxial growth and MOS structures of 4H-SiC on off-oriented n-type [0001] Si-faces

Guoshung Sun,, Jin Ning,, Yongxing Zhang,, Xin Gao,, Lei Wang,, Wanshun Zhao,, Yiping Zeng,, Jinmin Li,

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Volume:

Year:

2004

Language:

english

DOI:

10.1109/icsict.2004.1435318

File:

PDF, 1.14 MB

english, 2004

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