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Organometallic route to the chemical vapor deposition of titanium carbide films at exceptionally low temperatures
Girolami, Gregory S., Jensen, James A., Pollina, Deborah M., Allocca, Clare M., Kaloyeros, Alain E., Williams, Wendell S.Volume:
109
Language:
english
Journal:
Journal of the American Chemical Society
DOI:
10.1021/ja00239a053
Date:
March, 1987
File:
PDF, 289 KB
english, 1987