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On-chip copper–dielectric interference filters for manufacturing of ambient light and proximity CMOS sensors
Frey, Laurent, Masarotto, Lilian, Gros D’Aillon, Patrick, Pellé, Catherine, Armand, Marilyn, Marty, Michel, Jamin-Mornet, Clémence, Lhostis, Sandrine, Le Briz, OlivierVolume:
53
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.53.004493
Date:
July, 2014
File:
PDF, 858 KB
english, 2014