[IEEE 2012 IEEE International Frequency Control Symposium (FCS) - Baltimore, MD, USA (2012.05.21-2012.05.24)] 2012 IEEE International Frequency Control Symposium Proceedings - Zero temperature coefficient of frequency in extensional-mode highly doped silicon microresonators
Shahmohammadi, Mohsen, Harrington, Brandon P., Abdolvand, RezaYear:
2012
Language:
english
DOI:
10.1109/fcs.2012.6243640
File:
PDF, 1.80 MB
english, 2012