Extending the travel range of analog-tuned electrostatic...

Extending the travel range of analog-tuned electrostatic actuators

Hung, E.S., Senturia, S.D.
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Volume:
8
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.809065
Date:
January, 1999
File:
PDF, 798 KB
english, 1999
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