Energy Distributions of Atoms Sputtered from Cu-Pt Alloy Measured by Nonresonant Multiphoton Ionization Sputtered Neutrals Mass Spectrometry
Kunitomo, Shinta, Ono, Masahiro, Li, Chun Fei, Shimizu, RyuichiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.3991
Date:
September, 1993
File:
PDF, 565 KB
1993