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Phase Segregation of Polymethylsilsesquioxane in Antireflection Coatings
Chuang, Wen-Pin, Sheen, Yuung-Ching, Wei, Su-Mei, Teng, Chih-Chun, Yen, Ming-Yu, Ma, Chen-Chi M.Volume:
44
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma200722x
Date:
June, 2011
File:
PDF, 1.80 MB
english, 2011