Influence of ion/atom arrival ratio on structure and optical properties of AlN films by ion beam assisted deposition
Meng, Jian-ping, Fu, Zhi-qiang, Liu, Xiao-peng, Yue, Wen, Wang, Cheng-biaoVolume:
317
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.08.174
Date:
October, 2014
File:
PDF, 1.18 MB
english, 2014