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Site Selective Copper and Silver Electroless Metallization Facilitated by a Photolithographically Patterned Hydrogen Silsesquioxane Mediated Seed Layer
Harkness, Brian R., Rudolph, Michael, Takeuchi, KasumiVolume:
14
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm010373e
Date:
April, 2002
File:
PDF, 566 KB
english, 2002