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In situ TEM/SEM electronic/mechanical characterization of nano material with MEMS chip
Wang, Yuelin, Li, Tie, Zhang, Xiao, Zeng, Hongjiang, Jin, QinhuaVolume:
35
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/35/8/081001
Date:
August, 2014
File:
PDF, 8.08 MB
english, 2014