Atomic Layer Deposition of Y[sub 2]O[sub 3] Films on Silicon Using Tris(ethylcyclopentadienyl) Yttrium Precursor and Water Vapor
Majumder, Prodyut, Jursich, Gregory, Kueltzo, Adam, Takoudis, ChristosVolume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2929825
File:
PDF, 525 KB
english, 2008