Very fast-opening UHV gate valve
Sonderegger, Kurt, Dür, Michael, Buthig, Joachim, Pantazis, Sarantis, Jousten, KarlVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4813836
File:
PDF, 608 KB
english, 2013