Light Intensity Fibre Optic Sensor for MEMS displacement...

Light Intensity Fibre Optic Sensor for MEMS displacement and vibration metrology

Orłowska, Karolina, Słupski, Piotr, Świątkowski, Michał, Kunicki, Piotr, Sankowska, Anna, Gotszalk, Teodor
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Volume:
65
Language:
english
Journal:
Optics & Laser Technology
DOI:
10.1016/j.optlastec.2014.07.019
Date:
January, 2015
File:
PDF, 5.29 MB
english, 2015
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