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Nanosize Silicon Whiskers Produced by Chemical Vapor Deposition: Active Getters for NF3
Shen, Lu, Xiao, Youming, Vileno, Elizabeth, Ma, Ying, Suib, Steven L., Galasso, Francis S., Freihaut, James D., Hardwick, Steven J.Volume:
7
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00053a023
Date:
May, 1995
File:
PDF, 1.69 MB
english, 1995